FEI Quanta 3D FEG
- Field emission gun
- Acceleration Voltage: 0.2 - 30 kV
- Resolution: 1.2 nm
- Detectors:Everhart-Thornley
- Backscattered electron detector (BSED)
- Low vacuum secondary electron detector (LV-SED)
- Gaseous secondary electron detector (GSED)
- Variable pressure mode
- Environmental SEM mode
- Electron-Beam Lithography
- Focused ion beam (FIB) with 2 - 30 kV
- Resolution: 7 nm
- Omniprobe in-situ TEM sample lift-out