Zeiss LEO Gemini 1550
- Field emission gun
- Acceleration voltage: 0.1 - 30 kV
- Resolution: 1 nm
- Detectors:
- Everhart-Thornley
- InLens
- Energy-selected backscattered electrons (ESB)
- Analytical methods:
- Energy-dispersive X-ray (EDX), SDD (Silizium Drift Detector) Ultim Max 100
- Wavelength-dispersive X-ray (WDX) with 3-20 eV resolution